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Exhaust air collector for microchip technology

Aside from the standard duct system, special components are also needed in microchip facilities, such as silencers, multi-leaf dampers, or exhaust air collectors in tube form with diameters of several meters. These collectors are the key component of the exhaust air facility. This is where the exhaust air from all of the machines meets to then be redirected to the scrubber systems. If the collector fails, there will be a complete halt to production. The collectors must be statically calculated and designed; the maximum length of the single pieces is defined by the Halar-furnace measurements.

Project information

  • Interior coating: Halar
  • Dimensions: DN 2.500 mm, Length approx. 15 m
  • Duct material: stainless steel 1.4301
  • Low-pressure: 2.500 Pa
  • Location: Germany